R-ALD System by Maxima Sciences and GP Plasma

 

Research ALD System

We decided to offer the R-ALD system to lower the barrier to entry for labs to perform ALD research. We designed a system that accepts 3D samples, has a small footprint, low maintenance costs, accepts a variety of precursor vessels, and can be expanded to include in-situ monitoring. The R-ALD is the most economical research and development system on the market.

 

System Features

  • Most economical ALD system on the market.

  • Uses standard laboratory utilities with minimal connections to allow for quick and easy set-up.

  • Quick access door for system operation and maintenance.

 

  • Benchtop footprint

  • Designed for user managed maintenance to lower cost of ownership

  • Uses common vacuum fittings that allow the system to accept both pre-filled and refillable precursor vessels.

 

Basic System Specifications

Sample Volume : 610 mm length x 191 mm diameter

Temperature Range : RT to 200 °C

Precursor Capacity : 4 lines

Expansion Options

In-situ Analysis : Quartz crystal microbalance, optical emission spectroscopy, or a residual gas analyzer

Sample holders : fully customizable